Concept information
Preferred term
Definition
- 1) 俗称为工业应用等离子,如半导体芯片,太阳能电池生产的硅蚀刻沉积,沉积二氧化硅表面的钝化,表面活化,等离子弧熔化和焊接以及电浆化学。2) 等离子体技术包括快速充气单元,当电流通过时发光。
Broader concept
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